Analysis and comparison of metrology methods for quantifying micro-endmills

[摘要] (cont.) Furthermore, all four measurement techniques were found to be more accurate when measuring smaller tools than when measuring larger tools; in particular, SEM measurements of large tools suggested a high probability of incorrect measurement. The findings presented here have the potential to foster further discussion and use of on-machine measurement systems in microscale metrology over the currently prevailing microscopy methods, in particular SEM.

[发布机构] Massachusetts Institute of Technology