Deposition temperature of evaporated permalloy films

[摘要] A vacuum evaporated chromel and constantan thin filmthermocouple is developed and used to measure the deposition temperature of evaporated permalloy films. The maximum permalloy film temperature is 12000 higher than the glass substrate temperature during deposition for low evaporationrate, 15 Å/sec, due to radiation energy from the tungsten boat and condensation energy from the permalloy films. In all cases, the temperature change due to radiation energy greatly exceeds that due to condensation energy. The heat loss through the glass substrate is negligible duringdeposition; under this condition the temperature change during deposition is predicted by theory.

[发布机构] Rice University