Oxidative and initiated chemical vapor deposition for application to organic electronics

[摘要] (cont.) A click chemistry functionalizable poly (propargyl methacrylate) (PPMA) films also were prepared via initiated chemical vapor deposition (iCVD). PPMA itself exhibits e-beam sensitivity and hence can be directly patterned via electron beam (e-beam) lithography without requiring a conventional resist layer. With this PPMA layer, a nanopatterned multi-functional surface was also fabricated and we demonstrated the covalent functionalization of two independent components in a one-pot, self-sorted area-selective process, performed in an aqueous solution at room temperature, having conditions which are bioompatible. Finally, we report a novel nano-adhesive layer deposited by the iCVD process. An epoxy-containing polymer, poly (glycidyl methacrylate) (PGMA) was used as a nano-adhesive layer. No leakage was observed up to the test pressure of 50 psia from the resulting microfluidic devices.

[发布机构] Massachusetts Institute of Technology