Manufacturing error correction model of the wavelet transform processor using surface acoustic wave devices

[摘要] The goal of this study was to investigate the manufacturing error correction model of the wavelet transform processor (WTP) using surface acoustic wave (SAW) devices. The motive of this work was prompted by the output accuracy of the WTP using SAW devices varying with the manufacturing accuracy of each finger of the devices. Thus, in this paper, we presented the functional relationship between the size of the fingers on the layout and their actual measurement values, which are usually equal to their theoretical values we expected. These functional relationships, which also regarded as manufacturing error correction model, can be utilized to eliminate the size shift of each finger generated in the process of device fabrication. The theoretical and experimental results confirmed that the manufacturing error correction model can implement the design of the WTP using SAW devices with high output accuracy.

[学科分类] 电子、光学、磁材料

[关键词] surface acoustic wave (SAW) devices;wavelet transform processor;output accuracy;manufacturing error correction model