A scalable, optically-driven, high-voltage switch for remote MEMS device operation fabricated with a standard CMOS process

[摘要] We propose a high-voltage switch driven by wavelength-modulated light, which is suitable for remote MEMS (especially electrostatic actuators) device operation. It is fabricated on an SOI wafer and consists of series-connected n-MOSFETs whose substrates are mesa-isolated, allowing the switch to endure a high voltage. The fabrication process requires no modification in a standard CMOS process itself, which is easy for foundries to accept. In addition, by using wavelength-modulated light instead of electric circuits for the control of the switch, it achieves a simple, scalable, small switching circuit regardless of the switching voltage. Fabrication and operation of 50 V switch using 5 V standard CMOS technology is reported in this paper.

[学科分类] 电子、光学、磁材料

[关键词] high-voltage switch;standard CMOS process;MEMS;wavelength-modulated light