Study of annealing effects in Al–Sb bilayer thin films

[摘要] In this paper, we present preparation and characterization of Al–Sb bilayer thin films. Thin films of thicknesses, 3000/1000 Å and 3000/1500 Å, were obtained by the thermal evaporation (resistive heating) method. Vacuum annealing and rapid thermal annealing methods were used to mix bilayer thin film structure. Results obtained from optical band gap data and Rutherford back scattering spectrometry showed mixing of Al–Sb bilayer system.

[学科分类] 材料工程

[关键词] AlSb;thin film;RBS;optical band gap.