Indium oxide thin film based ammonia gas and ethanol vapour sensor

[摘要] A sensor for ammonia gas and ethanol vapour has been fabricated using indium oxide thin film as sensing layer and indium tin oxide thin film encapsulated in poly(methyl methacrylate) (PMMA) as a miniature heater. For the fabrication of miniature heater indium tin oxide thin film was grown on special high temperature corning glass substrate by flash evaporation method. Gold was deposited on the film using thermal evaporation technique under high vacuum. The film was then annealed at 700 K for an hour. The thermocouple attached on sensing surface measures the appropriate operating temperature.

[学科分类] 材料工程

[关键词] Indium oxide;ammonia sensor;ethanol vapour sensor;PMMA and Au.