Surface texture modification of spin-coated SiO2 xerogel thin films by TMCS silylation

[摘要] The SiO2 xerogel thin films were deposited successfully by sol–gel technique via the acid-catalyzed hydrolysis and condensation of tetraethylorthosilicate (TEOS) with ethanol as a solvent. Further, the deposited thin films were treated wet chemically by trimethylchlorosilane (TMCS) and hexane solution with 10% and 15% volume ratio to remove the hydroxyl groups from the surface of deposited SiO2 thin films. These as deposited and surfacemodified films were characterized by ellipsometer, Fourier transform infrared (FTIR) spectrometer and contact angle meter. The presence of 2900 and 850 cm-1 peaks of CH3 vibrations in FTIR spectra of surface-modified films confirms the hydrphobisation of SiO2 surface. The maximum contact angle of 108.7° was observed for the surface-modified film at 10% TMCS.

[学科分类] 材料工程

[关键词] Low-k;TMCS;surface modification;hydrophobic;contact angle.