Automated Manipulation of Micro-Nano Objects with SPM by Using L1 Adaptive Controller

[摘要] In this paper, a novel control methodology for automatically manipulating micro/nano particles by using a Scanning Probe Microscope (SPM) is presented. First of all, a mathematical model of micro/nanomanipulation, including the interactive forces and dynamics between the tip, particle and substrate along with the roughness effect of the substrate, is described. Then, the L1 adaptive control design for the manipulation system of micro/nano objects is presented, which consists of a state predictor with fast adaptation, a piece-wise continuous adaptive law and a low-pass filtered control design. This control framework can handle nonlinear uncertainties and ensures uniformly bounded tracking performance. The tracking performance bound can be systematically improved by reducing the step size of integration. Rigorous mathematical proof is provided. Simulation results demonstrate the effectiveness of the presented L1 adaptive control law on the micro/nanomanipulation model.

[学科分类] 自动化工程

[关键词] Micro/nanomanipulation;L1 Adaptive Control;SPM;Nonlinear dynamic systems