Design of a low-cost meso-scale, detachable fixturing system for probe-based nanomanufacturing equipment and instruments

[摘要] This paper introduces a low-cost, meso-scale, detachable kinematic fixturing system for use in alignment in probe-based nanomanufacturing. The fixturing system will be applied specifically to a nanopositioning system developed for the functionalization of DNA via dip pen nanolithography. A ball and groove kinematic coupling design was modified by the addition of flexural hinges to reduce the offset of friction on the coupling interface, thereby improving repeatability. A prototype fixturing assembly was fabricated and tested for repeatability in six degrees of freedom. The test results concluded that the kinematic fixturing system has a 1-[sigma] repeatability of approximately 50 nanometers and 3.5 microradians. This optimized kinematic coupling system will enable suitably repeatable, quick, and elegant assembly, thus advancing the manufacturing capabilities of dip pen nanolithography.

[发布机构] Massachusetts Institute of Technology