Method and instrumentation for the measurement and characterization of MEMS fabricated electrical contacts

[摘要] The results of these tests are used to create guidelines for designers of MEMS fabricated electrical contacts. Additionally, this platform can be used as a method of measurement and characterization for designers of MEMS fabricated electrical contacts to test any new contact geometries and materials in a quick cost effective manner. This method can also be used by research scientists investigating the fundamental physics of MEMS scale electrical contacts.

[发布机构] Massachusetts Institute of Technology