Alignment and actuation of compliant nanostructures and diffractive optics by inter-nanomagnet forces

[摘要] This thesis presents a novel method to stretch flexible nanostructures by nanomagnets interaction forces. We discuss the ability of different types of nanomagnets to distort several types of structures in two different cases. In the first, this method is applied for precise self-alignment of nanomembranes with applications in three-dimensional nanostructures manufacturing as well as distortion and patterning errors correction in a promising unconventional way. The second application addressed in this work shows the ability of nanomagnets to tune diffractive optical elements through deformation and actuation of nanostructured freestanding beams such as in a diffraction grating. This actuation combines the advantages of both analog and digital tuning techniques. For both applications, theoretical work, simulations, fabrication and experimental results demonstrating the promising power of nanomagnets over structural rigidity are presented.

[发布机构] Massachusetts Institute of Technology