Ring Resonator Photonic Sensing Device

[摘要] This thesis studies a micro ring resonator sensor structure built using the silicon-on-insulator (SOI)platform. The sensor detects changes in index of refraction with a sensitivity of 21 nm/RIU (RIU standsfor refractive index unit), in close agreement to the predicted sensitivity, from computer simulations,of 24.4 nm/RIU. A study of thermal effects and residue layers was performed and a future sensor designcapable of measuring layer thickness during evaporation is proposed.Background material relevant to the modelling of passive optical devices and a general overview ofsensor design is presented. The sensitivity of various waveguide structures to changes in cover index ofrefraction are studied using computer simulations. The change in free spectral range (FSR) of theresonator sensor was characterized and was used to extend the active range of the device.

[发布机构] University of Waterloo

[关键词] Physics