Incorporation of Fe into NiSi[subscript 2] precipitates

[摘要] The present paper provides evidence that Fe can be incorporated into NiSi[subscript 2] precipitates by solid-state diffusion. Furthermore, analysis of Si crystals contaminated with Ni and Fe at 1100°C and post annealed at 600°C and 800°C for 20–240 min revealed a strong indication that this incorporation is limited by bulk diffusion rather than incorporation kinetics.

[发布机构] Elsevier