Fabrication of Efficient, Large Aperture Transmission Diffraction Gratings by Ion-Beam Etching.

[摘要] We have designed and produced a high-efficiency transmission gratings fabricated in bulk fused silica for in high-power laser systems. These gratings were designed to diffractively compress 1050 nm - 1070 nm light. We have obtained diffracted efficiencies greater than 95% for m = -1 order in a near-Littrow configuration for a 2 diameter substrate. In addition, we have produce a 65 cm diameter bulk fused silica transmission grating that exhibits diffracted efficiency in places greater than 82% for m= -1 order. While we have made significant advances towards developing the ability to produce master gratings at this size, there are still several outstanding technology issues to be addressed.

[发布机构] Technical Information Center Oak Ridge Tennessee

[学科分类] 工程和技术（综合）

[关键词] Diffraction gratings;Ion beam etching;Pulsed power;Inertial confinement;Fused silica