Ion Implantation Processing Technologies for Telecommunications Electronics.

[摘要] The subject CRADA was a collaboration between Oak Ridge National Laboratory and Bell Laboratories, Lucent Technologies (formerly AT and T Bell Laboratories) to explore the development of ion implantation technologies for silicon integrated circuit (IC) manufacturing.

[发布机构] Technical Information Center Oak Ridge Tennessee

[学科分类] 工程和技术（综合）

[关键词] Integrated circuits;Ion implantation;Manufacturing;Ornl;Silicon