Integrated Circuit (IC) Chip with a Self-Contained Fluid Sensor and Method of Making the Chip

[摘要] An integrated circuit (IC) chip with a self-contained fluid sensor and method of making the chip. The sensor is in a conduit formed between a semiconductor substrate and a non-conductive cap with fluid entry and exit points through the cap. The conduit may be entirely in the cap, in the substrate or in both. The conduit includes encased temperature sensors at both ends and a central encased heater. The temperature sensors may each include multiple encased diodes and the heater may include multiple encased resistors.

[发布日期] 2019-01-29

[学科分类] 电子与电气工程

[关键词] INTEGRATED CIRCUITS;CHIPS;TEMPERATURE SENSORS;FLUID FLOW;MICROFLUIDIC DEVICES;MICROINSTRUMENTATION;SEMICONDUCTORS (MATERIALS);SUBSTRATES;DIODES;RESISTORS;SPACECRAFT INSTRUMENTS;PATENTS