Characterization of optical UV filters using Rutherford backscattering spectroscopy

[摘要] Rutherford backscattering spectroscopy (RBS) has been used during the development of multilayer thin film optical filters, especially designed for the fluorescence detector of the Pierre AUGER Project. Depth profiles of the heavy components have been measured directly, while reliable results for the light components could also be extracted indirectly. Relative thickness and density of the individual layers and deviations from the desired thickness and stoichiometry have been deduced. The findings of the RES method have been compared and discussed with results obtained by other characterization techniques. (C) 2000 Elsevier Science B.V. All rights reserved.Rutherford backscattering spectroscopy (RBS) has been used during the development of multilayer thin film optical filters, especially designed for the fluorescence detector of the Pierre AUGER Project. Depth profiles of the heavy components have been measured directly, while reliable results for the light components could also be extracted indirectly. Relative thickness and density of the individual layers and deviations from the desired thickness and stoichiometry have been deduced. The findings of the RES method have been compared and discussed with results obtained by other characterization techniques. (C) 2000 Elsevier Science B.V. All rights reserved.

[发布日期] 2000-03-01

[效力级别]  Proceedings Paper

[关键词] Rutherford backscattering;thin films;optical filters