Deposition of thin films using argon/acetylene atmospheric pressure plasma jet

[摘要] Atmospheric pressure plasma jet was used to deposit polymer films from argon/air/acetylene mixture. Depending on the gas composition, three modes of operation were observed and characterized. The film deposited by a. stationary jet had a circular shape with area (where thickness was almost constant) about the nozzle inner diameter. The deposition rate of stationary jet decreased with the time: a film of 2 mu m was obtained after the first two minutes, while in the next two minutes only 1.3 mu m film was deposited. The plasma polymers were characterized by infrared spectroscopy, where variety of C-H and few C-O bonds were detected. By using a linear displacement system, we obtained homogeneous deposition over a larger area with deposition rate of about 330 nm/min, showing the potential of such plasma jet system for large-scale depositions. (C) 2016 Elsevier B.V. All rights reserved.

[发布日期] 2017-02-25

[效力级别]  Proceedings Paper

[关键词] Plasma polymers;Plasma jet;Acetylene;Atmospheric pressure plasma