Deep learning enables nanoscale X-ray 3D imaging with limited data

[摘要] Deep neural network can greatly improve tomography reconstruction with limited data. A recent effort of combining ptycho-tomography model with the 3D U-net demonstrated a significant reduction in both the number of projections and computation time, and showed its potential for integrated circuit imaging that requires high-resolution and fast measurement speed.

[发布日期] 2023-05-30