Numerical modelling of nonlinear electromechanical coupling of an atomic force microscope with finite element method

[摘要] In this contribution, an atomic force microscope is modelled and in thiscontext, a non-linear coupled 3-D-boundary value problem is solved numericallyusing the finite element method. The coupling of this system is done by usingthe Maxwell stress tensor. In general, an iterative weak coupling is used,where the two physical problems are solved separately. However, this methoddoes not necessarily guarantee convergence of the nonlinear computation.Hence, this contribution shows the possibility of solving the multiphysicalproblem by a strong coupling, which is also referred to as monolithicapproach. The electrostatic field and the mechanical displacements arecalculated simultaneously by solving only one system of equation. Since theMaxwell stress tensor depends nonlinearly on the potential, the solution issolved iteratively by the Newton method.

[学科分类] 电子、光学、磁材料